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Sunnet Systems Inc.
Corporate Offices
2100 Walsh Ave, Suite B1,
Santa Clara, CA
95050
Tel: 408-845-0080
Fax:
408-845-0056
mailto:sales@sunnetsystems.com
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Horizontal
Dual Gun (HDG)
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The HDG system is the leader in adaptability and
flexibility. The HDG can be configured as:
- Dual Ion Beam Deposition
- Ion Beam Deposition + Ion Beam Etch
- Ion Beam Deposition
- Ion Beam Etch
- Manual Operation or Fully Automated
The HDG system is a popular research and development system with
universities and companies requiring small volume production with
maximum material flexibility.
The HDG system can be combined with many of Veeco's small-medium
sized DC and RF ion sources, supporting:
- A wide range of substrate sizes
- Metal and dielectric material compatibility
With the HDG's wide range of configuration options, we have the
solution for your application.
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| Options and Accessories |
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Substrate Fixtures
The HDG can be supplies with single rotation water cooled fixtures
with automated or manual tip-tilt capabilities. Solutions are
available for substrates up to 6-inches (150mm) in diameter. For
smaller substrates, the HDG can also be supplied with a planetary
fixture.
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Ion Source and Neutralizers
Both
RF and DC ion source and their corresponding neutralizers can be
integrated into the system.
The HDG system supports deposition sources of 3cm - 6cm in diameter and
Etch or assist sources from 3cm - 12cm in diameter. Please
refer to Veeco's Ion Source Products for specific information on the ion
sources options available.
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Gas Flow Control
A
GFC-1000U Gas Flow Controller will be provided for the ion beam source(s)
for automatic control of process gases.
The GFC-1000U can be configured for two or three channels of
operation with independent or ratio control.
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High Vacuum Pump
The HDG can be configured with either a CTI-10 cryo pump with ON
BOARD® control or a Leybold turbo pump.
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Sourcerer Ion Beam System Manager
Automated HDG systems are supplied with the Sourcerer Ion Beam System
Manager running on a dedicated control platform in a remote computer
rack. Sourcerer is the premier deposition system controller available
today. Providing an intuitive touch-screen user interface, system
control is literally at your finger tips.
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Target Fixture
When configured for deposition functionality, the HDG is fitted with
a water cooled 4-target assembly. The assembly supports use of un
to four different target materials in a single process run. The
target fixture supports four 5-inch (125mm) targets.
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